[2] Motamedi M E, Southwell W H,Gunning W L. Antireflection surfaces in silicon using binary optics technology[J]. Appl. Opt,1992,31(22):4371-4376.
[3] Grann E B, Moharam M G,Pommet D A. Optimal design for antireflective tapered two-dimensional subwavelength grating structures[J].J. Opt. Soc. Am.A, 1995,12(2):333-339.
[4] Bruer R,Bryngdahl O.Design of antireflection gratings with approximate and rigorous methods[J]. Appl. Opt,1994,33(34):7875-7882.
[5] Lalanne P, Astilean S, Chavel P. Blazed binary subwavelength gratings with efficiencies larger than those of conventional echelette gratings[J]. Opt. Lett, 1998,23(14):1081-1083.
[7] Turunen I,Wyrowski F. Diffractive Optics for Industrial and Commercial Applications[M], AkademieVerlag GmbH, Berlin, 1997, Chap.1997,11:305-307.
[8] Raguin D H,Mchael M G.Antireflection structured surfaces for the infrared spectral region[J]. Appl. Opt,1993,32(7):1154-1167.
[9] Zhang D W, Lu Z W, Yu W X, et al. Electromagnetic diffraction analysis of columned grid gratings[J]. J. Opt. A: Pure Appl. Opt,2002,4: 180-186.
[10] Zhang D W, Lu Z W, Yu W X, et al. Electromagnetic diffraction analysis of 2-D antireflective subwavelength grating with coned profile[J]. Chinese Journal of laser B, 2002,11(4):273-280.
