• Optoelectronics Letters
  • Vol. 12, Issue 3, 182 (2016)
Dong-ling LI*, Zhi-yu WEN, Zheng-guo SHANG, and Yin SHE
Author Affiliations
  • National Key Laboratory of Fundamental Science of Novel Micro/Nano Device and System Technology, Key Laboratory of Optoelectronic Technology and System of the Education Ministry of China, Micro System Reaserch Center, Chongqing University, Chongqing 400030, China
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    DOI: 10.1007/s11801-016-6015-4 Cite this Article
    LI Dong-ling, WEN Zhi-yu, SHANG Zheng-guo, SHE Yin. Thick SU8 microstructures prepared by broadband UV lithography and the applications in MEMS devices[J]. Optoelectronics Letters, 2016, 12(3): 182 Copy Citation Text show less
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    [1] DONG Yi, SONG Yan-fang, MA Lei, GAO Fang-fang. Surface morphology of refractive-index waveguide gratings fabricated in polymer films[J]. Optoelectronics Letters, 2016, 12(5): 329

    LI Dong-ling, WEN Zhi-yu, SHANG Zheng-guo, SHE Yin. Thick SU8 microstructures prepared by broadband UV lithography and the applications in MEMS devices[J]. Optoelectronics Letters, 2016, 12(3): 182
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