Hui WANG, Qiuling WEN, Hui HUANG, Guoqin HUANG, Feng JIANG, Jing LU, Xian WU. Ablation Characteristics and Material Removal Mechanism of CVD Single Crystal Diamond Under Femtosecond Laser Irradiation[J]. Acta Photonica Sinica, 2023, 52(12): 1214001
- Acta Photonica Sinica
- Vol. 52, Issue 12, 1214001 (2023)
Fig. 1. Surface topography of a CVD single crystal diamond
Fig. 2. Schematic of femtosecond laser processing of diamond
Fig. 3. SEM images of the micro-cracks and ablation debris at the diamond microgrooves in terms of laser fluence
Fig. 4. SEM images of the diamond microgrooves in terms of laser fluence
Fig. 5. SEM images of diamond microgrooves in terms of scanning speed
Fig. 6. SEM images of diamond microgrooves in terms of scanning times
Fig. 7. Variation of the width of diamond microgrooves with laser pulse energy and linear fitting of square of microgroove width versus logarithm of the laser pulse energy
Fig. 8. Three-dimensional morphologies and the corresponding cross-sectional curves of femtosecond laser-processed diamond microgrooves
Fig. 9. Variation of ablation rate and material removal rate with laser fluence for femtosecond laser processing of diamond
Fig. 10. Raman spectra analysis of diamond microgrooves processed by femtosecond laser
Fig. 11. Effect of different laser fluences on Raman spectra in the central region of diamond microgrooves
Fig. 12. Finite element simulation model of femtosecond laser processing of diamond and Temperature versus time curve at the center of the femtosecond laser
Fig. 13. Temperature distribution contour of femtosecond laser processing of diamond at the peak power moment
Fig. 14. Temperature profiles along X direction and Z direction in the diamond irradiated zone at the peak power moment
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Table 1. Parameters of the femtosecond laser
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Table 2. Physical properties of single crystal diamond［30］
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