• Piezoelectrics & Acoustooptics
  • Vol. 45, Issue 5, 663 (2023)
CHEN Gongtian1, XIE Ruoyuan1, SUN Jing1, ZHANG Wei2, and YANG Bin1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.11977/j.issn.1004-2474.2023.05.002 Cite this Article
    CHEN Gongtian, XIE Ruoyuan, SUN Jing, ZHANG Wei, YANG Bin. Design and Simulation of Ultra-Wideband FBAR Acoustic Wave Filters with Bandwidth Exceeding 3 GHz[J]. Piezoelectrics & Acoustooptics, 2023, 45(5): 663 Copy Citation Text show less

    Abstract

    In this paper, a design method for obtaining an ultra-wideband thin film bulk acoustic resonator (FBAR) filters based on aluminum nitride thin film with a relative bandwidth of about 70.61% has been proposed, that is a bandwidth of 4.835 GHz at a center frequency of 6.5 GHz. The simulation result shows that by series-parallel inductance and series-parallel capacitance at the inductance end, the influence of harmonic resonance point interference caused by adding external inductance on the bandpass can be eliminated, realizing the ultra-wideband of FBAR filters. This work opens up a new way to design ultra-wideband bulk acoustic wave filters with bandwidths exceeding 3 GHz.
    CHEN Gongtian, XIE Ruoyuan, SUN Jing, ZHANG Wei, YANG Bin. Design and Simulation of Ultra-Wideband FBAR Acoustic Wave Filters with Bandwidth Exceeding 3 GHz[J]. Piezoelectrics & Acoustooptics, 2023, 45(5): 663
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