Tingdi LIAO, Shaobin YAN, Qilu HUANG, Yantang HUANG, Xudong CUI. An apparatus for inspecting adjacent surfaces defects of TEC component based on equal-optical-path polarization splitting imaging[J]. Optical Instruments, 2021, 43(6): 64
- Optical Instruments
- Vol. 43, Issue 6, 64 (2021)
Fig. 1. Optical apparatus for simultaneously inspecting top and side surfaces defects of TEC components with polarization confocal imaging
Fig. 2. Illustration of prism relay system for the apparatus for inspecting adjacent surfaces defects of TEC components with equal-optical-path polarization imaging
Fig. 3. Illustration of configuration of CMOS polarization imaging sensor (polarization camera)
Fig. 4. Defect inspection of top and side surfaces of TEC components based on equal-optical-path polarization imaging
Fig. 5. Defect inspection of top and side surfaces of TEC components with quasi-confocal imaging (δ =1.62 mm)
Fig. 6. Defect inspection of top and side surfaces of TEC components when the top surface is focused (δ =1.62 mm)
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