Surface waves (SWs) are a special form of electromagnetic waves that travel along the boundary between a metal and a dielectric. The special optical properties of SWs render them very attractive in applications, such as subdiffractional lithography, novel biochemical sensors, and ultrafast integrated circuitries. Herein, we present a review of our recent progress in excitation and manipulation of terahertz SWs due to interference or coupling between a pair of slit resonators in metasurfaces, showing the ability to devise ultrathin and compact plasmonic components.