LU Sen, YANG Kai-ming, ZHU Yu, ZHANG Ming, WANG Lei-jie, HU Chu-xiong. Analysis and Controller Design of Fringe Phase Locking System for Interference Lithography[J]. Acta Photonica Sinica, 2017, 46(1): 123001

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- Acta Photonica Sinica
- Vol. 46, Issue 1, 123001 (2017)
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