• Optics and Precision Engineering
  • Vol. 15, Issue 12, 1921 (2007)
1, 2, 2, 2, and 1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: Cite this Article
    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Research of oxygen activation by synchrotron radiation in optical component cleaning process[J]. Optics and Precision Engineering, 2007, 15(12): 1921 Copy Citation Text show less
    References

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    [3] XU X D,ZHOU H J,HONG L Y,et al..Cleaning of contaminated optics devices by synchrotron radiation[J].Vacuum Science and Technology,2000,20(2):114-119.

    [4] QIAN H J,LIU F Q,TAO X P,et al..In-situ optical components cleaning by glow discharge[J].Vacuum Science and Technology,2001,21(2):147-149.

    [5] WARBURTON W,PIANETTA P.In-Situ optical element cleaning with photon activated oxygen[J].Nucl lnstr and Meth B.1992.A319:240-243.

    [6] E.E.KOCH and B.F.SONNTAG.Synchrotron Radiation:Techniques and Applications[M].New York:springer,1979.

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    [9] HATANO Y.Interaction of VUV photons with molecules spectroscopy and dynamics of molecular superexcited states[J].Journal of Electron Spectroscopy and Related Phenomena,2001,119:107-125.

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    [1] SONG Yuan, LU Qi-peng, GONG Xue-peng, WANG Yi, PENG Zhong-qi. Cleaning of carbon contamination on multilayer optics of EUVL[J]. Optics and Precision Engineering, 2017, 25(11): 2835

    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Research of oxygen activation by synchrotron radiation in optical component cleaning process[J]. Optics and Precision Engineering, 2007, 15(12): 1921
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