In an effort to extend the stroke of micro-actuators in micro-deformable mirrors, out-of-plane actuators with curved electrode and clamped-clamped beam are investigated. The static behaviors of actuators are solved by using the Rayleigh-Ritz method. During the calculation, tension stress and residual stress were considered. By studying the effects in stroke of actuators with different electrode shapes, actuators with a 500 μm long beam with a maximum stroke of 14.1 μm are obtained when subjected to the voltage of 300 V.