• Optics and Precision Engineering
  • Vol. 28, Issue 4, 878 (2020)
LU Qing-jie1,*, LIU Wei1, WEI Guang-yu1, and HAN Sen1,2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/ope.20202804.0878 Cite this Article
    LU Qing-jie, LIU Wei, WEI Guang-yu, HAN Sen. Wavelength-tuned phase-shifting interference system based on optical power real-time feedback and synchronous calibration[J]. Optics and Precision Engineering, 2020, 28(4): 878 Copy Citation Text show less

    Abstract

    Wavelength-tuned phase-shifting interferometry facilitates phase measurement by changing the wavelength of a tunable diode laser. Random variation of the optical power can cause phase errorsduring the phase-shifting process. To address this problem, an optical power real-time feedback control system and synchronous calibration scheme were developed. First, the measurement error caused by random variation of the optical power was analyzed. An optical power control system was then developed by utilizing suitable optoelectronic detection equipment to convert optical signals into electric signals, such that the optical power can be controlled using a PID. The experimental results show that the accuracy of the optical power is ±0.002 mW and the response speed can approach 600 kHz. Finally, the system was evaluated by detecting the optical component surface.When assembling the system, the PV and RMS are improved by 1.53×10-2λ和2.43×10-3λ, respectively. This system has an important role in high-precision optical component detection.
    LU Qing-jie, LIU Wei, WEI Guang-yu, HAN Sen. Wavelength-tuned phase-shifting interference system based on optical power real-time feedback and synchronous calibration[J]. Optics and Precision Engineering, 2020, 28(4): 878
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