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    Journals >Optics and Precision Engineering >Volume 14 >Issue 1 >Page 89 > Article
    • Optics and Precision Engineering
    • Vol. 14, Issue 1, 89 (2006)
    Research of dynamic error compensation for nano-positioning system based on grey model
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Research of dynamic error compensation for nano-positioning system based on grey model[J]. Optics and Precision Engineering, 2006, 14(1): 89 Copy Citation Text show less

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Research of dynamic error compensation for nano-positioning system based on grey model[J]. Optics and Precision Engineering, 2006, 14(1): 89
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