• Piezoelectrics & Acoustooptics
  • Vol. 46, Issue 3, 339 (2024)
JIN Zhong1, ZHANG Jiqin2, LYU Junhao1, RUAN Wenbiao2..., LIU Ya1, ZENG Jingyi1, SUN Mingbao1 and SUN Yanhong1|Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.11977/j.issn.1004-2474.2024.03.011 Cite this Article
    JIN Zhong, ZHANG Jiqin, LYU Junhao, RUAN Wenbiao, LIU Ya, ZENG Jingyi, SUN Mingbao, SUN Yanhong. Research on Au-Sn Bonding for Wafer-Level Packaging of FBAR Filters[J]. Piezoelectrics & Acoustooptics, 2024, 46(3): 339 Copy Citation Text show less

    Abstract

    As a passive, small-sized, and high-power-tolerant device, the film bulk acoustic resonator (FBAR) has been widely used in radio frequency signal processing.Wafer-level hermetic packaging represents miniaturized packaging and plays a critical role in various high-reliability applications.Both gold-gold and gold-tin bonding are widely used in FBAR hermetic wafer-level packaging.However, gold-tin bonding has a more straight forward implementation process.Therefore, this study investigates the application of gold-tin bonding in hermetic wafer-level packaging.Under the condition of ensuring bonding strength, 3 GHz filter samples were produced.The experimental results demonstrated identical perfomances with all samples passing the reliability tests.
    JIN Zhong, ZHANG Jiqin, LYU Junhao, RUAN Wenbiao, LIU Ya, ZENG Jingyi, SUN Mingbao, SUN Yanhong. Research on Au-Sn Bonding for Wafer-Level Packaging of FBAR Filters[J]. Piezoelectrics & Acoustooptics, 2024, 46(3): 339
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