1State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology (SIMIT), Chinese Academy of Sciences (CAS), Shanghai 200050, China
2CAS Center for Excellence in Superconducting Electronics (CENSE), Shanghai 200050, China
3Ori-chip Optoelectronics Technology Ltd., Ningbo 315000, China
4School of Physical Science and Technology, ShanghaiTech University, Shanghai 201210, China