Bin Shen, Haiyuan Li, Xu Zhang. Properties of Sol-Gel-Modified SiO2 Antireflective Films by Spin Coating[J]. Laser & Optoelectronics Progress, 2019, 56(14): 141602
- Laser & Optoelectronics Progress
- Vol. 56, Issue 14, 141602 (2019)
Fig. 1. Particle distribution of SiO2 coating solutions before and after filtration
Fig. 2. Process flow chart of ultrasonic cleaning
Fig. 3. Surface of substrate after hand cleaning. (a) Enlarged by 50 times; (b) enlarged by 200 times
Fig. 4. Surface of substrate after ultrasonic cleaning. (a) Enlarged by 50 times; (b) enlarged by 200 times
Fig. 5. Films on small size square KDP crystals by single spin coating method. (a) 3ω; (b) 1ω/2ω
Fig. 6. Transmittance of small size square crystals coated film
Fig. 7. Damage thresholds of films before and after defect control
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Table 1. Water contact angles of substrates with different cleaning methods
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Table 2. Transmittance peak wavelengths of small size square crystals coated film
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