CHEN Pan, ZHU Chunli, CUI Yuguo, HU Zhiyi, YANG Yiling, LOU Junqiang. Design of a x-y-θz Large Stroke Uncoupled Parallel Piezoelectric Micro-Positioning Stage[J]. Piezoelectrics & Acoustooptics, 2023, 45(5): 705

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- Piezoelectrics & Acoustooptics
- Vol. 45, Issue 5, 705 (2023)
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