Mao-sheng HOU, Yu-qing CHEN, Da-li LIU, Ming-li SUN, Zheng-xue SHI, Li-juan LI. Deviation Correction of Laser Scanning Projection Image Based on Time Compensation[J]. Acta Photonica Sinica, 2020, 49(4): 0411002
- Acta Photonica Sinica
- Vol. 49, Issue 4, 0411002 (2020)
Fig. 1. Schematic diagram of laser scanning system
Fig. 2. Projection error
Fig. 3. Causes of corner deviation
Fig. 4. Projected patterning and drive signal
Fig. 5. Effect of scanning speed on laser opening and closing error
Fig. 6. Projected patterning with time-compensated
Fig. 7. Optimal compensation time for each scanning speed
Fig. 8. Influence of corner deviation on projected patterning
Fig. 9. Angle deviation at different angles
Fig. 10. Optimal compensation time at different angles
Fig. 11. Optimal compensation time for different angles
Fig. 12. Projected patterning and laser scanning projection system
Fig. 13. Actual projected patterning
Fig. 14. Comparison of average position deviation before and after compensation correction
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Table 1. Data comparison
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