Contrastive measurement of off-axis paraboloids

Wei CHEN, Qing WANG^*, and Guibo ZHU

Author Affiliations

School of Electronic Engineering and Optoelectronic Technology, Nanjing University of Science and Technology, Nanjing 210094, China

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DOI: 10.3969/j.issn.1005-5630.2022.01.003 Cite this Article

Wei CHEN, Qing WANG, Guibo ZHU. Contrastive measurement of off-axis paraboloids[J]. Optical Instruments, 2022, 44(1): 15 Copy Citation Text

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Fig. 1. Diagram of off-axis paraboloid misalignment

Fig. 2. Exit pupil transformation diagram

Fig. 3. Optical path simulation

Fig. 4. Influence of adjustment error on aberration

Fig. 5. Actual measurements of stigmatic null test

Fig. 6. Variation diagram of rough adjustment process

Fig. 7. Software acquisition results of dynamic interferometer

Fig. 8. Luphoscan measurement of off-axis paraboloids

Fig. 9. Measurement results read by MATLAB

Table 1. Zernike coefficient of measured results

测量方式	测量过程	像差判断	Luphoscan测量结果初步消像散与
动态干涉仪	基于零位干涉原理，调节抛物面，使干涉图接近零条纹，解包获得面形。	无明显像差，但离轴量误差被视为调整误差调整掉了。
Luphoscan	基于多波长干涉测距原理，通过匹配抛物面小区域实际与理论sag值来确定离轴抛物面的偏心与倾斜，然后按离轴抛物面理论方程规划扫描路径，扫描过程始终垂直于待测面，计算实际与理论值偏差作为测量结果。	存在明显像散项