Wenxuan Chen, Qing Cao, Changjie Cheng, Chaoyue Li, Jirui Zhu, Yaxing Mao. Focusing Analysis of Linear Zone Plate with Equal-Width Single-Mode Slits Waveguide Working in Extreme Ultraviolet[J]. Laser & Optoelectronics Progress, 2024, 61(5): 0522004
- Laser & Optoelectronics Progress
- Vol. 61, Issue 5, 0522004 (2024)
Fig. 1. Schematic of linear zone plate. (a) Traditional linear zone plate (TLZP); (b) equal-width single-mode slit waveguide linear zone plate (ESSWLZP)
Fig. 2. Schematic diagram of equal-width single-mode slit waveguide linear zone plate
Fig. 3. Schematic of slit waveguide structure
Fig. 4. Theoretical and simulated fundamental mode normalized light field distribution in x direction of a single slit in the equal-width single-mode slit waveguide linear zone plate. (a)
Fig. 5. Theoretical and simulated normalized far-field light field distribution of a single slit in the equal-width single-mode slit waveguide linear zone plate at the wavelength of 13.5 nm
Fig. 6. Normalized far-field intensity distribution of the equal-width single-mode slit waveguide linear zone plate(ESSWLZP) and traditional linear zone plate(TLZP) at the wavelength of 13.5 nm
Fig. 7. Schematic of multilevel equal-width single-mode slit waveguide linear zone plate, the solid line represents a periodic region, the dashed line represents the boundary of each level.(a) 2-levels structure; (b) 4-levels structure
|
Table 1. Effective refractive index and propagation constant for different slit half widths at the wavelength of 13.5 nm
| |||||||||||||||||||||||||||||||||||||||||||||
Table 2. Number of modes and effective refractive index for different slit half widths at the wavelength of 13.5 nm
Set citation alerts for the article
Please enter your email address
© Copyright 2018-2021 | Chinese Laser Press. All Rights Reserved 沪ICP备15018463号-20