[2] HUANG X L Y, DU Y, BAO J, et al. Study of a 10 MHz MEMS oscillator with a TPoS resonator［J］.Sensors and Actuators A:Physical,2017,258:59-67.

[3] ZUO C, SINHA N, VAN DER SPIEGEL J, et al. Multifrequency pierce oscillators based on piezoelectric AlN contour-mode MEMS technology［J］.Journal of Microelectromechanical Systems,2010,19(3):570-580.

[4] JENH T, PILLAI G, LIU S I. et al. High-Q support transducer MEMS resonators enabled low-phase-noise oscillators［J］.IEEE Transactions on Ultrasonics,Ferroelectrics,and Frequency Control,2021,68(4):1387-1398.

[9] CHEN W,JIA W, XIAO Y, et al. Design,modeling and characterization of high-performance bulk-mode piezoelectric MEMS resonators［J］.Journal of Microelectromechanical Systems,2022,31(3):318-327.

[10] EISNER S R, CHAPIN C A, LU R, et al. A laterally vibrating lithiumniobate MEMS resonator array operating at 500 ℃ in air［J］.Sensors,2021,21(1):149.

[11] CHEN Zeji, WANG Tianyun, JIA Qianqian, et al. A novel Lamé mode RF-MEMS resonator with high quality factor［J］.International Journal of Mechanical Sciences,2021,204:106484.

[12] WU G, XU J, ZHANG X, et al. Wafer-level vacuum-packaged high-performance AlN-on-SOI piezoelectric resonator for Sub-100 MHz oscillator applications［J］.IEEE Transactions on Industrial Electronics,2018,65(4):3576-3584.