Chunhui MA, Xiaochong YU, Bing DUAN, Yanran WU, Xingyun ZHAO, Songyi LIU, Yongpan GAO, Daquan YANG, Xuan ZHANG. Flow Rate Sensing Based on Whispering Gallery Mode Microbubble Cavity[J]. Acta Photonica Sinica, 2024, 53(5): 0553114
- Acta Photonica Sinica
- Vol. 53, Issue 5, 0553114 (2024)
Fig. 1. Schematic diagram of the coupling system，inset：CCD image of the microbubble cavity filled with DI water
Fig. 2. The light field distribution of the fundamental mode，radial 2-order mode and radial 3-order mode with different wall thickness（t），and the inset in the upper right corner is the optical field distribution of the resonance modes in microbubble cavity
Fig. 3. Velocity field distribution and pressure field distribution of microbubble cavity at 100 μL/min
Fig. 4. Relationship between flow rate and pressure for the different ranges of the flow rate and analysis of the dynamic range
Fig. 5. Flow rate sensing experimental set-up
Fig. 6. Q-factor and stability characterization of WGM microbubble cavity
Fig. 7. Experimental results for flow rate sensing
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