Yuan Jiang, Yi Jiang, Liuchao Zhang, Sumei Wang. Non-Diaphragm Fiber Gas Pressure Sensor Based on Femtosecond Laser Machining[J]. Laser & Optoelectronics Progress, 2019, 56(10): 100601
- Laser & Optoelectronics Progress
- Vol. 56, Issue 10, 100601 (2019)
Fig. 1. Schematic of manufacturing process of fiber pressure sensor
Fig. 2. Micrographs of sensor before and after femtosecond laser machining. (a) Before machining; (b) after machining
Fig. 3. Spectrum of HF before and after femtosecond laser machining
Fig. 4. Schematic of fiber pressure sensor
Fig. 5. Test system of fiber pressure sensor
Fig. 6. Relationship between optical cavity length of pressure sensor and gas pressure in pressure range of 0-5 MPa. (a) Pressure increasing; (b) pressure decreasing
Fig. 7. Relationship between optical cavity length of sensor and gas pressure in pressure range of 0-0.4 MPa. (a) Pressure increasing; (b) pressure decreasing
Fig. 8. Measuring fluctuation of cavity length
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Table 1. Comparison of proposed sensor and other fiber pressure sensors
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