[1] Deng Qilin, Zhang Hong, Zhang Yongkang, et al. Comparison and analysis among excimer laser, CO2 laser and Nd∶YAG laser on ceramic manufacturing［J］. Aviation Precision Manufacturing Technology, 1995, 31(2): 27-29.

[2] Jiang Chao, Wang Youqing, Hu Shaoliu, et al. Study on precision machining Al2O3 by 248 nm KrF excimer laser［J］. Laser Journal, 2002, 23(2): 59-61.

[3] Zhang Anfeng, Zhou Zhimin, Zhu Gangxian, et al. Development of research on micromachining and cladding characteristics of excimer laser［J］. Foundry Technology, 2007, 28(9): 1252-1256.

[4] Zhang Anfeng, Zhu Gangxian, Zhou Zhimin, et al. Comparison of cladding characteristics on CO2 laser, Nd∶YAG laser and excimer laser［J］. Heat treatment of Metals, 2008, 33(6): 14-18.

[5] Zhang Lin, Lou Qihong, Wei Yunrong, et al. Comparison of etching characteristics of polymers by 193 nm and 308 nm excimer laser radiation［J］. Chinese J Lasers, 2002, 29(1): 25-28.

[6] Qi Shuming, Chen Chuansong, Zhou Xinling, et al. Study of damage mechanism on HgCdTe semiconductor material by excimer laser irradiation［J］. Acta Sinica Quantum Optica, 2009, 15(1): 76-83.

[7] Tseng A A, Chen Y T, Ma K J. Fabrication of high-aspect-ratio microstructures using excimer laser［J］. Opt Lasers Eng, 2004, 41(6): 827-847.

[8] Cai Lvzhong, Wang Chengyan, Zhou Yufang. Optics (Revised Edition)［M］. Jinan: Shandong University Press, 2002: 8-81.

[9] Desbiens J P, Masson P. ArF excimer laser micromachining of Pyrex, SiC and PZT for rapid prototyping of MEMS components［J］. Sensors and Actuators A, 2007, 136(2): 554-563.

[10] Zhu Chao. KrF excimer laser micro-machining mechanism and process experiment of A12O3 ceramics［D］. Dalian: Dalian University of Technology, 2010: 1-27.