Sanfeng HAO, Jian ZHANG, Jianfeng YANG. F/0.78 High Order Aspheric Surface Testing with Null Compensator and Mapping Distortion Correction[J]. Acta Photonica Sinica, 2023, 52(2): 0212004
- Acta Photonica Sinica
- Vol. 52, Issue 2, 0212004 (2023)
Fig. 1. Plot of the asphericity and asphericity slope
Fig. 2. High order aspheric surface testing with three-piece lens null compensator
Fig. 3. The interactive interface of initial structural parameters calculation program
Fig. 4. Optical layout with initial structure parameters
Fig. 5. The final design results of three-piece lens compensator
Fig. 6. High-order aspheric surfaces testing with three-piece lens compensator
Fig. 7. High-order aspheric surface imaging with null lens compensator
Fig. 8. Schematic diagram of distortion principle
Fig. 9. Mapping distortion correction of interferometeric map
Fig. 10. Optical deterministic polishing based on distortion correction map
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Table 1. Parameters of high-order aspheric surface
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Table 2. Structure data of null lens compensator
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Table 3. Tolerances and error budget for null lens compensator
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Table 4. Tolerances of null lens compensator
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Table 5. Parameters of ZYGO transmission spheres for testing surface irregularity of null lens compensator
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