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    Journals >Journal of Synthetic Crystals >Volume 49 >Issue 9 >Page 1641 > Article
    • Journal of Synthetic Crystals
    • Vol. 49, Issue 9, 1641 (2020)
    Research on Surround Coating Removal Technology for Polysilicon
    ZHANG Ting*, LIU Dawei, SONG Zhicheng, NI Yufeng..., YANG Lu and LIU Junbao|Show fewer author(s)
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    ZHANG Ting, LIU Dawei, SONG Zhicheng, NI Yufeng, YANG Lu, LIU Junbao. Research on Surround Coating Removal Technology for Polysilicon[J]. Journal of Synthetic Crystals, 2020, 49(9): 1641 Copy Citation Text show less
    References

    [5] Seidel H. Anisotropic etching of crystalline silicon in alkaline solutions［J］.Materials Science, Chemistry, 1990:3627-3629.

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    ZHANG Ting, LIU Dawei, SONG Zhicheng, NI Yufeng, YANG Lu, LIU Junbao. Research on Surround Coating Removal Technology for Polysilicon[J]. Journal of Synthetic Crystals, 2020, 49(9): 1641
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