Hongyu HUANG, Ruisheng WANG, Xiaomin LIN, Xianpeng LIANG, Ming DONG, Quan YUAN. Development of Low Wavefront Distortion Dichroic Mirror for Super-resolution Imaging[J]. Acta Photonica Sinica, 2025, 54(1): 0111002
- Acta Photonica Sinica
- Vol. 54, Issue 1, 0111002 (2025)
Fig. 1. The curve of PV variation with annealing temperature and its linear fitting graph
Fig. 2. The variation curve of the film thickness ratio of Ta2O5 and SiO2 materials with annealing temperature under stress cancellation
Fig. 3. Design spectral curve
Fig. 4. Spectral curve
Fig. 5. Reflected PV value
Fig. 6. Spectral curve after environmental testing
Fig. 7. Reflected PV value after environmental testing
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Table 1. The specifications of dichroic beamsplitter
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Table 2. Optimal process parameters of Ta2O5，Nb2O5，SiO2
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Table 3. Reflected PV values before and after coating 2 000 nm single-layer Ta2O5，Nb2O5，SiO2 materials
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Table 4. Reflected PV and ΔPV values of Ta2O5，Nb2O5，and SiO2 after annealing at different temperatures
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