Hao LIU, Tianqi ZHAO, Chunlian ZHAN, Yanxia ZOU, Shangzhong JIN. Testing technology of vacuum ultraviolet spectral radiance[J]. Journal of Applied Optics, 2022, 43(6): 1138
- Journal of Applied Optics
- Vol. 43, Issue 6, 1138 (2022)
Fig. 1. Schematic diagram of spectral radiance test based on direct measurement method
Fig. 2. Schematic diagram of spectral radiance test based on comparative method
Fig. 3. Schematic diagram of vacuum UV spectral radiance test system
Fig. 4. Physical drawing of vacuum UV spectral radiance test system
Fig. 5. Test results of transmittance at 121.2 nm by attenuator
Fig. 6. Test results of transmittance at 135.6 nm by attenuator
Fig. 7. Test results of transmittance at 160 nm by attenuator
Fig. 8. Test results of transmittance at 180 nm by attenuator
Fig. 9. Test results of transmittance at 200 nm by attenuator
Fig. 10. Test results of attenuator transmittance at different wavelengths
Fig. 11. Effect of combined attenuator on test results
Fig. 12. Effect of different vacuum degree environment on vacuum UV spectrum measurement
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Table 1. Test results of vacuum UV spectral radiance
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Table 2. Vacuum UV spectral radiance record of combined attenuator
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Table 3. Partial test results of vacuum UV spectral radiance repeatability
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