[1] Li Yafeng. Preparation of the PZT-based piezoelectric ceramic and application in the acceleration sensor［D］. Henan: Zhengzhou University, 2016: 1-18.
[2] Han Huajun. Experiment and research on ultra-precision grinding process of medical piezoelectric ceramics slice［D］. Jiangsu: Soochow University, 2009: 2-31.
[3] Zhang Tiemin, Xu Zhilin, Cao Fei, et al. Design and experiment of a power supply to drive a macro-micro piezoelectric actuator［J］. Piezoelectrics and Acoustooptics, 2015, 37(1): 167-171.
[5] Tang Gang, Liu Jingquan, Yang Chunsheng, et al. Preparation and micro-patterning of bulk PZT thick films for piezoelectric micropower harvester［J］. Vacuum, 2011, 48(2): 19-21.
[6] Shao Weiping, Zhang Fenghu, Liu Shuangjie, et al. Micro-EDM parameter optimization and machining quality analysis［J］. Tool Engineering, 2015, 49(3): 46-48.
[7] Fu Xiuzuo. Study on the processes and mechanism of piezoelectric self-adaptive microelectrical discharge machining［D］. Shandong: Shandong University, 2012: 17-26.
[8] Wang Shi, Guo Jianwen, Jiang Wuxue, et al. Simulative study of machining mechanism of material in micro-EDM［J］. Journal of System Simulation, 2015, 27(12): 2891-2897.
[9] Jin Yuhua, Zhao Yan, Jiang Yijian. Microlens beam shaping and homogenizing optical system for exicimer laser［J］. Chinese J Lasers, 2015, 42(6): 0602003.
[10] Luo C, Li Y, Susumu S. Fabrication of high aspect ratio subwavelength gratings based on X-ray lithography and electron beam lithography［J］. Optics & Laser Technology, 2012, 44(6): 1649-1653.
[11] Gatabia J R, Rahmana S, Amarob A, et al. Tuning electrical properties of PZT film deposited by pulsed laser deposition［J］. Ceramics International, 2017, 43(8): 6008-6012.
[12] Butt M Z, Majeed A M, Khaliq M W, et al. Structural, electrical, and mechanical characterization of Al 5086 alloy irradiated with 248 nm-20 ns KrF excimer laser［J］. Journal of Alloys and Compounds, 2017, 695: 3069-3082.
[13] Khodaei M, Eshghinejad A, Ebrahimi S A A. Nanoscale magnetoelectric coupling study in (111)-oriented PZT-Co ferrite multiferroic nanobilayer thin film using piezoresponse force microscopy: Effect of Co ferrite composition［J］. Sensors & Actuators A Physical, 2016, 242: 92-98.
[14] Wan Qiang, Lu Yimin, Mi Chaowei, et al. Reserch on anti-reflective diamond-like carbon film deposited by 248 nm nanosecond laser［J］. Laser & Optoelectronics Progress, 2015, 52(9): 093101.
