Hongbo Shang, Luwei Zhang, Chunlai Liu, Ping Wang, Yongxin Sui, Huaijiang Yang, "Optimization based on sensitivity for material birefringence in projection lens," Chin. Opt. Lett. 18, 062201 (2020)
- Chinese Optics Letters
- Vol. 18, Issue 6, 062201 (2020)
Fig. 1. Distribution of the first ±9 OZP terms.
Fig. 2. Layout of the NA 0.93 optical system.
Fig. 3. Birefringence map. (a) Element 1, RMS value is 0.54 nm/cm and PV value is 1.16 nm/cm; (b) element 11, RMS value is 0.52 nm/cm and PV value is 1.26 nm/cm; (c) element 17, RMS value is 0.61 nm/cm and PV value is 1.49 nm/cm.
Fig. 4. OZP coefficients of elements 1, 11, and 17.
Fig. 5. Retardation pupil before optimization. (a) Field 1, RMS value is 7.80 nm; (b) field 2, RMS value is 7.07 nm; (c) field 3, RMS value is 6.29 nm.
Fig. 6. OZP coefficients of the retardation pupil before optimization.
Fig. 7. Retardation pupil after optimization. (a) Field 1, RMS value is 2.25 nm; (b) field 2, RMS value is 2.45 nm; (c) field 3, RMS value is 2.77 nm.
Fig. 8. OZP coefficients of the retardation pupil after optimization.
Fig. 9. Comparison of convergence between the PSO and NLS methods.
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Table 1. First ±6 Terms of OZP
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Table 2. Projection Lens Parameters
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Table 3. Rotation Angles for Each Lens Element After Optimization
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