• Optics and Precision Engineering
  • Vol. 20, Issue 4, 719 (2012)
LI Xian-ling*
Author Affiliations
  • [in Chinese]
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    DOI: 10.3788/ope.20122004.0719 Cite this Article
    LI Xian-ling. Design of CNC non-contact super-smooth polishing machine for optical components[J]. Optics and Precision Engineering, 2012, 20(4): 719 Copy Citation Text show less

    Abstract

    A Computer Numerical Control (CNC) non-contact super-smooth polishing method for optical components was proposed. Polishing fluid was provided through a center hole of the polishing tool for the optical surface and it interacted with the surfaces of optical components drived by a rotated polishing tool to remove the materials on the optical components minutely. The motion trajectory of the polishing tool could be controlled by the computer. According to the proposed principle, a prototype of CNC non-contact super-smooth polishing machine for the optical components was designed and developed, and its minimum feed rate and positioning accuracy for the linear motion axis are 0.000 1 m/s and 0.008 mm,respectively; the minimum rotate speed and positioning accuracy for the swing shaft are 0.002 8 r/min and 15′,respectively. The performance of the prototype could meet the requirements of spherical/aspherical optical components with diameters less than 200 mm for super-smooth polishing. To verify the prototype, an experiment was performed on a fused silica component. After super-smooth polishing for 20 min, the surface roughness of two points on the optical component is improved from 1.03 nm and 0.92 nm to 0.48 nm and 0.44 nm, which shows the polishing accuracy has been optimized greatly.
    LI Xian-ling. Design of CNC non-contact super-smooth polishing machine for optical components[J]. Optics and Precision Engineering, 2012, 20(4): 719
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