• Optics and Precision Engineering
  • Vol. 20, Issue 6, 1265 (2012)
WANG Li1,2,3,*, RAO Chang-hui1,2, and RAO Xue-jun1,2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    DOI: 10.3788/ope.20122006.1265 Cite this Article
    WANG Li, RAO Chang-hui, RAO Xue-jun. Feed-forward control of piezoelectric ceramic positioning stage[J]. Optics and Precision Engineering, 2012, 20(6): 1265 Copy Citation Text show less

    Abstract

    As the nonlinear hysteresis of a piezoelectric ceramic positioning stage affects its dynamic positioning precision badly, this paper proposes a model for the piezoelectric ceramic hysteresis based on a modified PI hysteresis model. In order to improve the dynamic positioning precision of the piezoelectric ceramic positioning stage based on traditional PID algorithm, the feed-forward control is constituted with the modified PI inverse hysteresis model and a traditional PID, and the experiments on slow speed and high speed positionings are performed. Experimental results show that the maximal error and mean error of the feed-forward controller are 40% and 20%-30% that of traditional PID algorithm for tracking single frequency trajectory.For multi-frequency trajectory tracking,the feed-forward controller has better dynamic control effect, and both maximal error and mean error are almost 33% that of traditional one.These data indicate the availability of the feed-forward control algorithm.
    WANG Li, RAO Chang-hui, RAO Xue-jun. Feed-forward control of piezoelectric ceramic positioning stage[J]. Optics and Precision Engineering, 2012, 20(6): 1265
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