Broadband Mo/Si muhilayer polarization optical elements were developed for the extreme ultraviolet(EUV)region,including a reflective analyzer and a transmission phase retarder.These multilayers were designed by a combined analytical/numerical method based on an aperiodic stack.Then these aperiodic multilayers were fabricated using direct-current magnetron sputtering technology.The multilayer structures were measured by an X-ray Diffractometer(XRD)working at the Cuthe Program for New Century Excellent Talents in University(No.NCET-04-0376).Ka line,and the polarization response Was characterized by the polarimeter on the UE56/1-PGM1 beamline at BESSY-Ⅱ,in Berlin.The measured s-polarized reflectivity is higher than 15% over the 13～19 nm wavelength range,and nearly constant s-reflectivity,up to 37%,is observed over the 15～17nm wavelength range.Furthermore,these aperiodic multilayers show high s-reflectivity and polarization over a wide angular range at fixed wavelength.The measured phase shift is 41.7°over the 13.8～15.5 nm wavelength range.Using an aperiodic transmission phase retarder and a reflection analyzer,a complete broadband polarization analysis system was developed.The polarization properties of the synchrotron radiation from the beamline UE56/1 PGM1 at BESSY-Ⅱ were systematically characterized in the 12.7～15.5 nm wavelength range by this newly developed broadband polarization analysis system.This kind of broadband multilayer polarizing elements can be used in EUV polarization measurements and will greatly simplify experimental arrangements.