Chi WANG, Wei CHEN, Jianmei SUN, Yuancheng ZHENG, Feilu CHEN. MEMS fiber optic acoustic sensor and performance testing method based on ultra-small GRIN fiber lens[J]. Optics and Precision Engineering, 2022, 30(12): 1406
- Optics and Precision Engineering
- Vol. 30, Issue 12, 1406 (2022)
Fig. 1. Schematic diagram of the sensor structure
Fig. 2. Model of ultra-small GRIN fiber probe
Fig. 3. Pressure stimulation results of the MEMS sensitive membrane
Fig. 4. Relationship between form and position
Fig. 5. Development process of ultra-small GRIN optical fiber lens
Fig. 6. Photos of the MEMS film
Fig. 7. Manufacturing steps of the sensor
Fig. 8. Image of the sensor head
Fig. 9. Sensor performance detection model based on SS-OCT demodulation system
Fig. 10. Performance test system of MEMS optical fiber acoustic sensor
Fig. 11. Single frequency test under 300 Hz acoustic frequency
Fig. 12. Single frequency response spectrogram
Fig. 13. Test under 100 Hz and 300 Hz mixed frequency
Fig. 14. Frequency spectrum of dual-frequency signal
Fig. 15. Frequency spectrum of tri-band signal under 1 kHz，2 kHz and 3 kHz mixed frequency
Fig. 16. Frequency response characteristic of the sensor
Fig. 17. Acoustic pressure response performance of the optical fiber acoustic pressure sensor
Fig. 18. Frequency spectrum without signal input
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Table 1. Sound pressure sensitivity of the sensor
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