Chunxiao Hao, Wentao Zhang, Xianying Wang, Xunzhi Huang. Analysis and Verification of Position Error of Reticle Stage Based on Planar Grating[J]. Laser & Optoelectronics Progress, 2019, 56(23): 231202
- Laser & Optoelectronics Progress
- Vol. 56, Issue 23, 231202 (2019)
Fig. 1. Schematic of measurement optical paths of planar grating and laser interferometer
Fig. 2. Installation layout of planar grating and laser interferometer of reticle stage
Fig. 3. Analytical diagrams of model errors. (a) Abbe error; (b) cosine error
Fig. 4. Error analysis diagrams of degree of freedom Rx with respect to degree of freedom in y direction
Fig. 5. Error analysis diagrams of degree of freedom Rz with respect to degree of freedom in y direction
Fig. 6. Error analysis diagrams of degree of freedom Ry with respect to degree of freedom in y direction
Fig. 7. Error analysis diagrams of degree of freedom Rz with respect to degree of freedom in y direction
Fig. 8. Error analysis diagrams of degrees of freedom y and Rx with respect to degree of freedom in y direction
Fig. 9. Simulation results of Y -direction coupling coefficient. (a) First-order coupling coefficient; (b) high-order coupling coefficient
Fig. 10. Experimental system for reticle stage measurement
|
Table 1. Ranges of degree of freedom of reticle stage
|
Table 2. Coupling coefficients of three degrees of freedom of planar grating
| |||||||||||||||||||||||||||||||||||||||||
Table 3. Comparison of position accuracy between laser interferometer and planar gratingmm
Set citation alerts for the article
Please enter your email address
© Copyright 2018-2021 | Chinese Laser Press. All Rights Reserved 沪ICP备15018463号-20