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    Journals >Semiconductor Optoelectronics >Volume 42 >Issue 5 >Page 635 > Article
    • Semiconductor Optoelectronics
    • Vol. 42, Issue 5, 635 (2021)
    A New Design of MEMS Infrared Source for CO2 Gas Sensor
    YANG Jing1,2, LI Xiaofei1, LI Zhongzhou3, YU Jun3..., TANG Zhenan3, MEI Yong1, ZHANG Lingshu1 and YUAN Yupeng1|Show fewer author(s)
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  • 1[in Chinese]
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    DOI: 10.16818/j.issn1001-5868.2021072905 Cite this Article
    YANG Jing, LI Xiaofei, LI Zhongzhou, YU Jun, TANG Zhenan, MEI Yong, ZHANG Lingshu, YUAN Yupeng. A New Design of MEMS Infrared Source for CO2 Gas Sensor[J]. Semiconductor Optoelectronics, 2021, 42(5): 635 Copy Citation Text show less
    References

    [3] Barth A. Infrared spectroscopy of proteins[J]. Biochimica et Biophysica Acta, 2007, 1767(9): 1073-1101.

    [5] Yang J, Cheng Y, Yuan Y, et al. Design and optimization of an integrated MEMS gas chamber with high transmissivity[J]. Digital Communications and Networks, 2021, 7(1): 82-91.

    [10] Li Y, Yu J, Wu H, et al. Design and fabrication of a CMOS compatible MHP gas sensor[J]. AIP Advances, 2014, 4: 031339.

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    YANG Jing, LI Xiaofei, LI Zhongzhou, YU Jun, TANG Zhenan, MEI Yong, ZHANG Lingshu, YUAN Yupeng. A New Design of MEMS Infrared Source for CO2 Gas Sensor[J]. Semiconductor Optoelectronics, 2021, 42(5): 635
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