In order to ensure the accurate measurement of laser diodes (LDs), it was important to set and maintain a stable temperature. Based on the analysis of the temperature characteristics of LD, a new temperature control design with high stability was presented, which was a combination of several techniques that controlled accurately the temperature of laser diode and kept the detection and transmission of signals accuracy. Experimental results indicate that the temperature stability can attain to±0.01℃ at 10℃-40℃, and±0.005℃ at 25℃. So the design is an effective approach to enable better process control in a LD production environment. Depending on the setting of control parameter, it can also be applied to the temperature control system of other kinds of semiconductor laser.