[1] Zhu J Q[M]. Design and development of large high power laser device, 207-260(2020).

[2] Zheng W G, Zu X T, Yuan X D et al[M]. Damage resistance and physical problems of high power laser facilities, 1-32(2014).

[3] Bass I, Vickers J, Guss G et al. Fused silica optics damage from downstream intensification on laser-induced damage precursors[J]. Applied Optics, 60, 11084-11093(2021).

[4] Shi Z H, Sun L X, Shao T et al. Statistically correlating laser-induced damage performance with photothermal absorption for fused silica optics in a high-power laser system[J]. Photonics, 9, 137(2022).

[5] Chen H Y, Feng G Y, Fan W X et al. Laser plasma-induced damage characteristics of Ta2O5 films[J]. Optical Materials Express, 9, 3132-3145(2019).

[6] Han J H, Li Y G, He C T et al. Effects of laser plasma on damage in optical glass induced by pulsed lasers[J]. Optical Engineering, 51, 121809(2012).

[7] Feit M D, Rubenchik A M, Faux D R et al. Modeling of laser damage initiated by surface contamination[J]. Proceedings of SPIE, 2966, 417-424(1997).

[8] Yang Y Y, Chai H T, Li C et al. Surface defects evaluation system based on electromagnetic model simulation and inverse-recognition calibration method[J]. Optics Communications, 390, 88-98(2017).

[9] Lou W M, Cao P, Zhang D H et al. Optical element surface defect size recognition based on decision regression tree[J]. Applied Sciences, 10, 6536(2020).

[10] Chen X, Li J Q, Sui Y X. A new stitching method for dark-field surface defects inspection based on simplified target-tracking and path correction[J]. Sensors, 20, 448(2020).

[11] Liu D, Wang S T, Cao P et al. Dark-field microscopic image stitching method for surface defects evaluation of large fine optics[J]. Optics Express, 21, 5974-5987(2013).

[12] Nolot E, Arrazat B, Favier S et al. Laser scattering: a fast, sensitive, In-line technique for advanced process development and monitoring[C], 931, 116-120(2007).

[13] Wu F, Cao P, Du Y B et al. Calibration and image reconstruction in a spot scanning detection system for surface defects[J]. Applied Sciences, 10, 2503(2020).

[14] Florescu D, Rodier D R, Knollenberg B A. Detection and measurement of particulate contaminants[M]. Handbook of silicon wafer cleaning technology, 659-699(2018).

[15] Yazaki A, Kim C, Chan J et al. Ultrafast dark-field surface inspection with hybrid-dispersion laser scanning[J]. Applied Physics Letters, 104, 251106(2014).

[16] Kim M S, Choi H S, Lee S H et al. A high-speed particle-detection in a large area using line-laser light scattering[J]. Current Applied Physics, 15, 930-937(2015).

[17] Dong J T. Line-scanning laser scattering system for fast defect inspection of a large aperture surface[J]. Applied Optics, 56, 7089-7098(2017).

[18] Liu J, Liu J, Liu C G et al. 3D dark-field confocal microscopy for subsurface defects detection[J]. Optics Letters, 45, 660-663(2020).

[19] Liu J, Hua Z J, Liu C G. Compact dark-field confocal microscopy based on an annular beam with orbital angular momentum[J]. Optics Letters, 46, 5591-5594(2021).

[20] Wang D, Chen Y, Wang Y et al. Comparison of line-scanned and point-scanned dual-axis confocal microscope performance[J]. Optics Letters, 38, 5280-5283(2013).

[21] Yang X D, Shao J X, Liao S H et al. Investigation on measuring beam width of the Gaussian beam by knife-edge method[J]. Laser & Infrared, 39, 829-832(2009).

[22] Lilienfeld P. Optical detection of particle contamination on surfaces: a review[J]. Aerosol Science and Technology, 5, 145-165(1986).