Lunzhe Wu, Xueke Xu, Lingqi Wu, Zhe Wang. Method of edge control on surface error in aspherical optics (invited)[J]. Infrared and Laser Engineering, 2022, 51(9): 20220602
- Infrared and Laser Engineering
- Vol. 51, Issue 9, 20220602 (2022)
Fig. 1. Calibration of influence function
Fig. 2. Self-affine fractal surface
Fig. 3. Surface error of optics in low frequency and high frequency
Fig. 4. PSD diagram of a surface in self-affine fractal
Fig. 5. Flow chart of surface error extrapolation in Zernike analysis
Fig. 6. Flow chart of surface error extrapolation in Laplace’s equation
Fig. 7. Flow chart of surface error extrapolation in Z-L
Fig. 8. Evaluation method of extrapolation in Z-L
Fig. 9. Extrapolation surface error in Z-L
Fig. 10. Extrapolation surface error in Z-L compared with original data
Fig. 11. (a) Influence function and (b) residual error
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