SiO₂ artificial opal templates are fabricated,and metal organic chemical vapour deposition is used to infill the voids of prepared silica colloidal crystals with InP. The samples are characterized by scanning electron microscopy and UV-VIS spectroscopy. The results show that the crystallization temperature is an important factor in the infilling of InP. By the increasing of crystallization temperature,the infilling ratio of InP decreases.