Suocheng Wang, Shiyun Dong, Shixing Yan, Xiaoting Liu. Fabrication of Micro/Nano Structures on Metal Surfaces by Femtosecond Laser and Its Technical Applications[J]. Laser & Optoelectronics Progress, 2023, 60(17): 1700005

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- Laser & Optoelectronics Progress
- Vol. 60, Issue 17, 1700005 (2023)
![General process of femtosecond laser interact with metal[21]](/richHtml/lop/2023/60/17/1700005/img_01.jpg)
Fig. 1. General process of femtosecond laser interact with metal[21]
![Optical absorption properties test of micro/nano flower structures constructed on copper surface[31]. (a) Reflectance of bare copper, commercial copper, and copper covered with micro/nano hierarchical structures in the 200-2000 nm wavelength band; (b) reflectance test of commercial copper and copper covered with micro/nano hierarchical structures as the incident angle changes in the 200-800 nm wavelength band](/richHtml/lop/2023/60/17/1700005/img_02.jpg)
Fig. 2. Optical absorption properties test of micro/nano flower structures constructed on copper surface[31]. (a) Reflectance of bare copper, commercial copper, and copper covered with micro/nano hierarchical structures in the 200-2000 nm wavelength band; (b) reflectance test of commercial copper and copper covered with micro/nano hierarchical structures as the incident angle changes in the 200-800 nm wavelength band
![Photothermal conversion performance of micro/nano flower structures constructed on copper[31]. (a) Schematic diagram of photothermal conversion test of copper sheet with micro/nano flower structures; (b) average absorbances of different samples](/Images/icon/loading.gif)
Fig. 3. Photothermal conversion performance of micro/nano flower structures constructed on copper[31]. (a) Schematic diagram of photothermal conversion test of copper sheet with micro/nano flower structures; (b) average absorbances of different samples
![Process flow chart of fabricating high-efficiency anti-reflection surfaces on metal surfaces by femtosecond laser pulse implantation[32]](/Images/icon/loading.gif)
Fig. 4. Process flow chart of fabricating high-efficiency anti-reflection surfaces on metal surfaces by femtosecond laser pulse implantation[32]
![When the femtosecond laser wavelength was 400 nm, and the polarization direction was parallel to the scanning direction, the surface periodic structure was prepared on the tungsten surface[37]. (a) SEM image of the periodic structure induced by laser; (b) enlarged view of the center position of Fig.(a)](/Images/icon/loading.gif)
Fig. 5. When the femtosecond laser wavelength was 400 nm, and the polarization direction was parallel to the scanning direction, the surface periodic structure was prepared on the tungsten surface[37]. (a) SEM image of the periodic structure induced by laser; (b) enlarged view of the center position of Fig.(a)
![When the femtosecond laser wavelength was 800 nm, and the polarization direction was parallel to the scanning direction, the surface periodic structure was prepared on the tungsten surface[37]. (a) SEM image of the periodic structure induced by laser; (b) enlarged view of the center position of Fig.(a)](/Images/icon/loading.gif)
Fig. 6. When the femtosecond laser wavelength was 800 nm, and the polarization direction was parallel to the scanning direction, the surface periodic structure was prepared on the tungsten surface[37]. (a) SEM image of the periodic structure induced by laser; (b) enlarged view of the center position of Fig.(a)
![Preparation of copper hydroxide and copper oxide urchin like micro/nano structures with wide band antireflection properties on copper surface by femtosecond laser composite chemical oxidation[39]. (a) (b) SEM images of the urchin-like arrays; (c) (d) SEM images of nanowires and nanoflowers; (e) (f) SEM images of the nanoflowers fabricated by chemical oxidation alone](/Images/icon/loading.gif)
Fig. 7. Preparation of copper hydroxide and copper oxide urchin like micro/nano structures with wide band antireflection properties on copper surface by femtosecond laser composite chemical oxidation[39]. (a) (b) SEM images of the urchin-like arrays; (c) (d) SEM images of nanowires and nanoflowers; (e) (f) SEM images of the nanoflowers fabricated by chemical oxidation alone
![Surface structure and wettability of lotus leaf[43]. (a) Appearance of lotus leaf; (b) infiltration of lotus leaf surface; (c) (d) SEM images of lotus leaf](/Images/icon/loading.gif)
Fig. 8. Surface structure and wettability of lotus leaf[43]. (a) Appearance of lotus leaf; (b) infiltration of lotus leaf surface; (c) (d) SEM images of lotus leaf
![Preparation of superhydrophilic and underwater superoleophobic microporous structures on titanium foil surface by femtosecond laser[50]. (a)-(d) SEM images of microporous; (e)-(h) oil-water separation experiment of titanium foil contains microporous structures](/Images/icon/loading.gif)
Fig. 9. Preparation of superhydrophilic and underwater superoleophobic microporous structures on titanium foil surface by femtosecond laser[50]. (a)-(d) SEM images of microporous; (e)-(h) oil-water separation experiment of titanium foil contains microporous structures
![Preparation of microporous arrays on the surface of copper foil by femtosecond laser spatial light shaping[51]. (a) Optical image of copper sheet with microporous, the left one contains microporous and the right one was pristine copper sheet; (b) microscope picture of microporous; (c)(d) SEM images of microporous on copper sheet](/Images/icon/loading.gif)
Fig. 10. Preparation of microporous arrays on the surface of copper foil by femtosecond laser spatial light shaping[51]. (a) Optical image of copper sheet with microporous, the left one contains microporous and the right one was pristine copper sheet; (b) microscope picture of microporous; (c)(d) SEM images of microporous on copper sheet
![Experiment of oil-water separation with microporous structure prepared by femtosecond laser spatial light shaping[51]. (a) Oil-water mixture and separation device; (b)(c) oil-water separation process diagram](/Images/icon/loading.gif)
Fig. 11. Experiment of oil-water separation with microporous structure prepared by femtosecond laser spatial light shaping[51]. (a) Oil-water mixture and separation device; (b)(c) oil-water separation process diagram
![Morphology of the titanium sheet processed by the combination of femtosecond laser combined chemical oxidation[53]. (a) Three-dimensional image of the micro/nano structures; (b) (c) SEM images of the micro/nano structures](/Images/icon/loading.gif)
Fig. 12. Morphology of the titanium sheet processed by the combination of femtosecond laser combined chemical oxidation[53]. (a) Three-dimensional image of the micro/nano structures; (b) (c) SEM images of the micro/nano structures
![Preparation of TiO2 micro/nano structures by femtosecond laser combined chemical oxidation and research its photocatalytic performances[53]. (a) Test of light reflection performances of titanium sheet covered with various TiO2 micro/nano structures; (b) spectral absorption test of organic dyes after TiO2 degradation; (c) photodegradation rate test of TiO2 prepared by composite method and chemical oxidation alone; (d) cyclic performance test of photodegradation of TiO2](/Images/icon/loading.gif)
Fig. 13. Preparation of TiO2 micro/nano structures by femtosecond laser combined chemical oxidation and research its photocatalytic performances[53]. (a) Test of light reflection performances of titanium sheet covered with various TiO2 micro/nano structures; (b) spectral absorption test of organic dyes after TiO2 degradation; (c) photodegradation rate test of TiO2 prepared by composite method and chemical oxidation alone; (d) cyclic performance test of photodegradation of TiO2
![Preparation of TiO2 nanotubes by femtosecond laser processing combined chemical oxidation[54]. (a) Original titanium sheet; (b) (c) preparation of TiO2 nanotubes by anodization alone; (d) microstructure arrays fabricated by femtosecond laser; (e) hierarchical TiO2 nanotubes; (f) amorphous layer on the surface of titanium sheet after femtosecond laser processing; (g) (h) schematic diagram of hierarchical structures](/Images/icon/loading.gif)
Fig. 14. Preparation of TiO2 nanotubes by femtosecond laser processing combined chemical oxidation[54]. (a) Original titanium sheet; (b) (c) preparation of TiO2 nanotubes by anodization alone; (d) microstructure arrays fabricated by femtosecond laser; (e) hierarchical TiO2 nanotubes; (f) amorphous layer on the surface of titanium sheet after femtosecond laser processing; (g) (h) schematic diagram of hierarchical structures
![Application of femtosecond laser processing metal materials in aerospace. (a) Micro-holes of engine fuel injector fabricated by femtosecond laser[55]; (b) air film holes array of turbine blade fabricated by femtosecond laser[56]; (c) heat sink fabricated on metal surface by femtosecond laser[57]](/Images/icon/loading.gif)
Fig. 15. Application of femtosecond laser processing metal materials in aerospace. (a) Micro-holes of engine fuel injector fabricated by femtosecond laser[55]; (b) air film holes array of turbine blade fabricated by femtosecond laser[56]; (c) heat sink fabricated on metal surface by femtosecond laser[57]
![Preparation of micro/nano structures on titanium alloy by femtosecond laser processing and test its anti-icing performance[63]. (a1)-(a4) Freezing process of droplets when the scanning speed was 600 mm/s; (b1)-(b4) freezing process of droplets when the scanning speed was 2000 mm/s; (c1)-(c4) freezing process of droplets when the scanning speed was 5000 mm/s](/Images/icon/loading.gif)
Fig. 16. Preparation of micro/nano structures on titanium alloy by femtosecond laser processing and test its anti-icing performance[63]. (a1)-(a4) Freezing process of droplets when the scanning speed was 600 mm/s; (b1)-(b4) freezing process of droplets when the scanning speed was 2000 mm/s; (c1)-(c4) freezing process of droplets when the scanning speed was 5000 mm/s
![Femtosecond laser fabricates micro/nano structures with different morphologies on copper surface and tests its anti-icing[64]. (a) (b) SEM images of copper surface morphologies when the laser scanning speed was 20 mm/s; (c) (d) SEM images of copper surface morphologies when the laser scanning speed was 60 mm/s; (e) (f) SEM images of copper surface morphologies when the laser scanning speed was 100 mm/s; (g) freezing delay test of copper sheets at low temperatures](/Images/icon/loading.gif)
Fig. 17. Femtosecond laser fabricates micro/nano structures with different morphologies on copper surface and tests its anti-icing[64]. (a) (b) SEM images of copper surface morphologies when the laser scanning speed was 20 mm/s; (c) (d) SEM images of copper surface morphologies when the laser scanning speed was 60 mm/s; (e) (f) SEM images of copper surface morphologies when the laser scanning speed was 100 mm/s; (g) freezing delay test of copper sheets at low temperatures
![Principle of making corneal flap with femtosecond laser[66]](/Images/icon/loading.gif)
Fig. 18. Principle of making corneal flap with femtosecond laser[66]
![Preparation of micro/nano structures of zirconium-based materials by femtosecond laser processing[71]. (a) SEM image of the materials processed by femtosecond laser; (b) (c) magnification images of material surface](/Images/icon/loading.gif)
Fig. 19. Preparation of micro/nano structures of zirconium-based materials by femtosecond laser processing[71]. (a) SEM image of the materials processed by femtosecond laser; (b) (c) magnification images of material surface
![Preparation of anticoagulant and antibacterial micro/nano structures on nitinol alloy by temporally shaped femtosecond laser[72]. (a) Single-pulse laser shaping into double-pulse; (b) preparation of porous structures; (c) anticoagulant and antibacterial performance test of porous structure; (d) anticoagulant and antibacterial performance test of nitinol alloy bare sheet](/Images/icon/loading.gif)
Fig. 20. Preparation of anticoagulant and antibacterial micro/nano structures on nitinol alloy by temporally shaped femtosecond laser[72]. (a) Single-pulse laser shaping into double-pulse; (b) preparation of porous structures; (c) anticoagulant and antibacterial performance test of porous structure; (d) anticoagulant and antibacterial performance test of nitinol alloy bare sheet
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Table 1. Femtosecond laser preparation of micro/nano structures with different morphologies on common metal materials
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Table 2. Application of femtosecond laser fabrication of metal surface micro/nano structures in environmental engineering
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Table 3. Application of femtosecond laser fabrication of metal surface micro/nano structures in aerospace
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Table 4. Application of femtosecond laser fabrication of metal surface micro/nano structures in biomedicine

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