Fig. 1. Design concept of the four mirror optical system
Fig. 2. Layout of the optical system
Fig. 3. Ray footprint of each mirror M1-M4 (color for each field)
Fig. 4. Residual sag distribution 3D diagram of each mirror after removing the best-fit sphere
Fig. 5. Spot diagram of the optical system
Fig. 6. Full field RMS geometric spot radius distribution
Fig. 7. Full field RMS wavefront error distribution
Fig. 8. MTF curves of the optical system
Fig. 9. Distorted mesh of the optical system
Fig. 10. Relative illuminance along Y direction
Fig. 11. Relative illuminance along X direction
Fig. 12. 3D model of system mechanical structure
Fig. 13. Integrated flexible 3D structure of M2
Fig. 14. Boundary conditions of the finite element model
Fig. 15. The deformation datas of the mirrors and focal plane are imported into the optical software
Fig. 16. Full field RMS geometric spot radius distribution
Fig. 17. Wavefront testing optical path (a) and test photographic (b) of the system
Fig. 18. Wavefront aberration of typical field of view
Parameter | Specifications | Resolution/pixel | 640×512 | Pixel size/μm2 | 25×25 | Spectral band/μm | 7.7-10.0 | Entrance pupil diameter/mm | 73 | F-number
| 2 | Field of view/(°) | 6.25×5.0 | Distortion | <5% | RMS spot size/μm | <50×50 | RMS wavefront error | <1λ@632.8 nm
| Package size/mm3 | <150×250×300 | Working temperature/℃ | 10-30 |
|
Table 1. Specification of the optical system
Term | XY polynomial
| Coefficient of M1 | Coefficient of M2 | Coefficient of M3 | Coefficient of M4 | 1 | X0Y1
| −1.91590e-02 | −4.85671e-02 | 1.04008e-01 | −9.21760e-02 | 2 | X2Y0
| −6.09199e-04 | 1.48764e-03 | 3.00154e-02 | 1.86876e-04 | 3 | X0Y2
| −7.87246e-04 | 6.40174e-04 | 2.82810e-02 | −2.30088e-04 | 4 | X2Y1
| −8.05246e-06 | −8.45861e-06 | 3.34959e-05 | −3.48285e-06 | 5 | X0Y3
| −6.55433e-06 | −1.09920e-05 | 2.33983e-06 | −3.22347e-06 | 6 | X4Y0
| 2.31375e-08 | −8.36654e-09 | 9.54513e-06 | 7.97118e-09 | 7 | X2Y2
| 2.95744e-08 | −1.37912e-07 | 2.41580e-05 | −1.39353e-08 | 8 | X0Y4
| 1.02931e-08 | −1.43957e-07 | 1.29804e-05 | −1.63718e-08 | 9 | X4Y1
| −2.87921e-10 | −8.54897e-10 | −3.81025e-07 | −2.18160e-10 | 10 | X2Y3
| −4.62580e-10 | −3.00746e-09 | 3.11828e-09 | −5.13363e-10 | 11 | X0Y5
| −1.89183e-10 | −2.32407e-09 | −3.87337e-08 | −2.60893e-10 | 12 | X6Y0
| 1.08579e-12 | 3.93228e-13 | 4.29815e-09 | 6.11019e-13 | 13 | X4Y2 | 5.39421e-12 | −7.60172e-12 | 6.35325e-08 | −2.01506e-12 | 14 | X2Y4
| 5.93096e-12 | −3.12901e-11 | 3.73110e-08 | −5.25985e-12 | 15 | X0Y6
| 1.89380e-12 | −2.73598e-11 | 1.60445e-08 | −2.60015e-12 | 16 | X6Y1
| −3.74645e-14 | −1.50798e-13 | 3.80074e-09 | −5.13163e-14 | 17 | X4Y3
| −7.57945e-14 | −2.30257e-13 | 2.12275e-10 | −1.60806e-13 | 18 | X2Y5
| −6.16321e-14 | −3.77989e-13 | 1.84473e-10 | −1.35982e-13 | 19 | X0Y7
| −1.68419e-14 | −2.20673e-13 | 3.74348e-10 | −4.21283e-14 |
|
Table 2. XYpolynomial coefficients of M1-M4
No. | Term | Value | | No. | Term | Value | 1 | Detector position compensation | ±2.00 mm | | 4 | Distance between M3 and M4 | ±0.05 mm | 2 | Distance between M1 and M2 | ±0.05 mm | 5 | X-decenter of M1
| ±0.02 mm | 3 | Distance between M2 and M3 | ±0.05 mm | 6 | Y-decenter of M1
| ±0.02 mm | 7 | X-tilt of M1
| ±0.017° | | 16 | Y-decenter of M3
| ±0.02 mm | 8 | Y-tilt of M1
| ±0.017° | 17 | X-tilt of M3
| ±0.017° | 9 | Z-tilt of M1
| ±0.017° | 18 | Y-tilt of M3
| ±0.017° | 10 | X-decenter of M2
| ±0.02 mm | 19 | Z-tilt of M3
| ±0.017° | 11 | Y-decenter of M2
| ±0.02 mm | 20 | X-decenter of M4
| ±0.02 mm | 12 | X-tilt of M2
| ±0.017° | 21 | Y-decenter of M4
| ±0.02 mm | 13 | Y-tilt of M2
| ±0.017° | 22 | X-tilt of M4
| ±0.017° | 14 | Z-tilt of M2
| ±0.017° | 23 | Y-tilt of M4
| ±0.017° | 15 | X-decenter of M3
| ±0.02 mm | 24 | Z-tilt of M4
| ±0.017° |
|
Table 3. Allocation table for positioning and attitude tolerance of M1-M4
Density/
kg·m3 | Thermal expansion coefficient
/K
| Elastic modulus/
N·m−2 | Poisson's ratio | Thermal conductivity
/W·(m·K)−1 | 2710 | 2.4E-5 | 6.9E10 | 0.33 | 154 |
|
Table 4. 6061-T6 material properties