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    Journals >Infrared and Laser Engineering >Volume 36 >Issue 4 >Page 464 > Article
    • Infrared and Laser Engineering
    • Vol. 36, Issue 4, 464 (2007)
    Analysis on the films of SiGe heterostructure prepared by magnetron sputtering
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    [in Chinese], [in Chinese], [in Chinese]. Analysis on the films of SiGe heterostructure prepared by magnetron sputtering[J]. Infrared and Laser Engineering, 2007, 36(4): 464 Copy Citation Text show less

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    [in Chinese], [in Chinese], [in Chinese]. Analysis on the films of SiGe heterostructure prepared by magnetron sputtering[J]. Infrared and Laser Engineering, 2007, 36(4): 464
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