Lili Dong, Qing Gao, Jiasen Wu, Xiangyu Xia, Shiming Liu, Junshan Xiu. Rapid quantitative analysis of ZnGa2O4（GZO） thin films using picosecond laser induced breakdown spectroscopy[J]. Infrared and Laser Engineering, 2023, 52(3): 20220470
- Infrared and Laser Engineering
- Vol. 52, Issue 3, 20220470 (2023)
Fig. 1. Transmittance of GZO films at different sputtering powers
Fig. 2. Optical band gap widths of GZO films at different sputtering powers
Fig. 3. Schematic diagram of PS-LIBS experimental set up
Fig. 4. Typical LIBS spectra of GZO thin films
Fig. 5. Boltzmann diagram obtained from Ga lines
Fig. 6. Voigt fitting of Ga lines I 403.29 nm
Fig. 7. Intensity variation of Ga lines I 403.29 nm at different positions
Fig. 8. Zn/Ga spectral line intensity ratio and atomic concentration ratio of GZO films at different sputtering powers
Fig. 9. Zn/Ga calibration curves of GZO films at different sputtering powers
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Table 1. EDS data of GZO films at different sputtering powers
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Table 2. Spectral lines of target elements
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Table 3. Spectral lines data of Ga using to calculate the plasma temperature
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