Bohan Cheng, Xiaojing Yang, Yanjun Guo, Tong Yao, Jie Kang. Process Optimization and Experimental Research on Surface Roughness of Single-Crystal Germanium for Ultra-Precision Cutting[J]. Laser & Optoelectronics Progress, 2023, 60(19): 1916001
- Laser & Optoelectronics Progress
- Vol. 60, Issue 19, 1916001 (2023)
Fig. 1. Single-point diamond lathe used for processing single-crystal germanium
Fig. 2. Schematic diagram of turning experiment
Fig. 3. Experimental equipment and results. (a) Taylor Hobson PGI 1240 contacting mechanical profiler; (b) schematic diagram of measurement direction of single-crystal germanium wafer
Fig. 5. Surface roughness values of single-crystal germanium sheets in all directions
Fig. 6. Main effect diagrams of cutting parameters affecting surface roughness Ra value. (a) Bright area; (b) dark area
Fig. 7. Surface roughness Ra values under optimal cutting parameters
Fig. 8. Topography under optimal cutting parameters. (a) Surface topography; (b) chip topography
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Table 1. Machining parameters of turning experiment
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Table 2. Orthogonal experimental scheme
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Table 3. Analysis of variance table of surface roughness Ra of single-crystal germanium in bright area
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Table 4. Analysis of variance table of surface roughness Ra of single-crystal germanium in dark area
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Table 5. Range analysis table of surface roughness Ra in bright area
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Table 6. Range analysis table of surface roughness Ra in dark area
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