• Laser & Optoelectronics Progress
  • Vol. 60, Issue 19, 1916001 (2023)
Bohan Cheng1, Xiaojing Yang1,*, Yanjun Guo1, Tong Yao1, and Jie Kang2
Author Affiliations
  • 1Faculty of Mechanical and Electrical Engineering, Kunming University of Science and Technology, Kunming 650500, Yunnan, China
  • 2Yunnan KIRO Photonics Co., Ltd., Kunming 650217, Yunnan, China
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    DOI: 10.3788/LOP221420 Cite this Article Set citation alerts
    Bohan Cheng, Xiaojing Yang, Yanjun Guo, Tong Yao, Jie Kang. Process Optimization and Experimental Research on Surface Roughness of Single-Crystal Germanium for Ultra-Precision Cutting[J]. Laser & Optoelectronics Progress, 2023, 60(19): 1916001 Copy Citation Text show less
    References

    [1] He J, Chen N, Chen Z Y et al. Effects of laser thermal processing on composition distribution of SiGe core silica cladding fiber[J]. Laser & Optoelectronics Progress, 58, 0306001(2021).

    [2] Guo R X, Gao H R, Cheng Z Z et al. Advances on mid-infrared germanium integrated photonics[J]. Chinese Journal of Lasers, 48, 1901002(2021).

    [3] Yuan Z R, Dou Y W, Fang P et al. Fabrication of mid-infrared ZnGeP2 crystals and devices with large apertures and ultra-low absorption coefficients[J]. Chinese Journal of Lasers, 49, 0101023(2022).

    [4] Ji X Y, Lei S M, Yu S Y et al. Single-crystal silicon optical fiber by direct laser crystallization[J]. ACS Photonics, 4, 85-92(2017).

    [5] Miao S, Shi G Q, Shi G F et al. Effect of germanium single-crystal anisotropy on roughness of cutting surface[J]. Mechanical Science and Technology for Aerospace Engineering, 36, 89-94(2017).

    [6] Jiang F, Li J F, Sun J et al. Research actualities of ductile machining for hard and brittle materials[J]. Tool Engineering, 41, 3-8(2007).

    [7] Du J, Li Z J, Gong H et al. Study on the mechanisms and control method of edge chipping fracture in the machining of brittle and hard materials[J]. Mechanical Science and Technology for Aerospace Engineering, 32, 1451-1455(2013).

    [8] Xia X G, Zhang Y. Effects of germanium single-crystal anisotropy in SPDT[J]. New Technology & New Process, 110-112(2014).

    [9] Geng R W, Yang X J, Xie Q M et al. Material removal mechanism of monocrystalline germanium based on nano-scratch experiment[J]. Journal of Inorganic Materials, 34, 867-872(2019).

    [10] Luo L, Yang X J, Liu N et al. Nano-cutting temperature field distribution and the influence of anisotropy on cutting temperature of single crystal germanium[J]. Rare Metal Materials and Engineering, 48, 1130-1134(2019).

    [11] Pham V T, Fang T H. Interfacial mechanics and shear deformation of indented germanium on silicon (001) using molecular dynamics[J]. Vacuum, 173, 109184(2020).

    [12] Kiran M S R N, Haberl B, Bradby J E et al. Nanoindentation of silicon and germanium[M]. Semiconductors and semimetals, 91, 165-203(2015).

    [13] Yang X J, Liu H, Zhao B et al. Effect of cutting speed on brittle plastic transition of single crystal germanium[J]. Aerospace Materials & Technology, 48, 80-84(2018).

    [14] Zhao B. Research on brittle-ductile transition mechanism of single crystal germanium in micro-nano scale[D](2017).

    [15] Wang S, Zheng Z Y, Zhou M G et al. Influence of laser cladding parameters on turning performance of laser-cladded 316 stainless steel coating on 45 steel surface[J]. Laser & Optoelectronics Progress, 58, 2114010(2021).

    [16] Sui B, Huo F R, Li C et al. Ultra-precision turning process and optimization of infrared diffraction optical mold insert[J]. Acta Optica Sinica, 42, 1312004(2022).

    [17] Gao X, Li C, Kan J Y et al. Optimization of diamond turning process for CaF2 diffractive optical elements[J]. Acta Optica Sinica, 41, 2205001(2021).

    [18] Mukaida M, Yan J W. Ductile machining of single-crystal silicon for microlens arrays by ultraprecision diamond turning using a slow tool servo[J]. International Journal of Machine Tools and Manufacture, 115, 2-14(2017).

    [19] Kang Z, Nie F M, Liu J S et al. Research on single point diamond precision numerical control turning technique for infrared crystal optical parts[J]. New Technology & New Process, 76-79(2010).

    Bohan Cheng, Xiaojing Yang, Yanjun Guo, Tong Yao, Jie Kang. Process Optimization and Experimental Research on Surface Roughness of Single-Crystal Germanium for Ultra-Precision Cutting[J]. Laser & Optoelectronics Progress, 2023, 60(19): 1916001
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