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    Journals >Acta Optica Sinica >Volume 43 >Issue 19 >Page 1936001 > Article
    • Acta Optica Sinica
    • Vol. 43, Issue 19, 1936001 (2023)
    Freestanding Silicon Thin-Film Filters with High Transmission in Extreme Ultraviolet Range
    Xiaoran Li1,2,*, Yiwen Chen1,2, Mojie Xie1,2, and Jiaoling Zhao2,3
    Author Affiliations
  • 1School of Microelectronics, Shanghai University, Shanghai 200072, China
  • 2Laboratory of Thin Film Optics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 3Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
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    DOI: 10.3788/AOS231172 Cite this Article Set citation alerts
    Xiaoran Li, Yiwen Chen, Mojie Xie, Jiaoling Zhao. Freestanding Silicon Thin-Film Filters with High Transmission in Extreme Ultraviolet Range[J]. Acta Optica Sinica, 2023, 43(19): 1936001 Copy Citation Text show less
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    Article index updated: Apr. 17, 2025
    The article is cited by 1 article(s) CLP online library. (Some content might be in Chinese.)
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    Xiaoran Li, Yiwen Chen, Mojie Xie, Jiaoling Zhao. Freestanding Silicon Thin-Film Filters with High Transmission in Extreme Ultraviolet Range[J]. Acta Optica Sinica, 2023, 43(19): 1936001
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    Paper Information
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