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    Journals >Acta Optica Sinica >Volume 43 >Issue 11 >Page 1113002 > Article
    • Acta Optica Sinica
    • Vol. 43, Issue 11, 1113002 (2023)
    Robustness Analysis Method and Simulation Research of Alignment Mark
    Guangying Zhou1,3, Yuejing Qi1,3,*, Liang Li2, Miao Jiang2..., Jiangliu Shi2 and Mingyi Yao1,3|Show fewer author(s)
    Author Affiliations
  • 1Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China
  • 2Beijing Superstring Academy of Memory Technology, Beijing 100176, China
  • 3University of Chinese Academy of Sciences, Beijing 100049, China
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    DOI: 10.3788/AOS222161 Cite this Article Set citation alerts
    Guangying Zhou, Yuejing Qi, Liang Li, Miao Jiang, Jiangliu Shi, Mingyi Yao. Robustness Analysis Method and Simulation Research of Alignment Mark[J]. Acta Optica Sinica, 2023, 43(11): 1113002 Copy Citation Text show less
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    Article index updated: Apr. 26, 2025
    The article is cited by 1 article(s) CLP online library. (Some content might be in Chinese.)
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    Guangying Zhou, Yuejing Qi, Liang Li, Miao Jiang, Jiangliu Shi, Mingyi Yao. Robustness Analysis Method and Simulation Research of Alignment Mark[J]. Acta Optica Sinica, 2023, 43(11): 1113002
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