Bin Liu, Qian Qiao, Jing Zhao, Zimiao Zhang, Zhiwei Li, Baofeng Zhang. 3D profile measurement based on depth from focus method using high-frequency component variance weighted entropy image sharpness evaluation function[J]. Infrared and Laser Engineering, 2021, 50(5): 20200326
- Infrared and Laser Engineering
- Vol. 50, Issue 5, 20200326 (2021)
Fig. 1. Schematic diagram of 3D profile measurement based on DFF
Fig. 2. Acquired image sequence
Fig. 3. Curves of the common image sharpness evaluation functions
Fig. 4. Canny operator processing result
Fig. 5. Flow chart of the calculation process of HCVWE function
Fig. 6. Curves of the proposed HCVWE and common image sharpness evaluation functions
Fig. 7. Schematic diagram of the sensitivity factor
Fig. 8. Gaussian fitting result
Fig. 9. Hardware system
Fig. 10. Standard height step
Fig. 11. Scanning and image acquisition process
Fig. 12. Measurement result of the standard step
Fig. 13. Distance from each upper surface point to the lower plane
Fig. 14. Distance from each upper surface point to the upper plane
Fig. 15. Distance from each lower surface point to the lower plane
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Table 1. Quantitative evaluation indexes
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Table 2. Data of the focusing repeatability test data (Unit: μm)
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