• Nano-Micro Letters
  • Vol. 16, Issue 1, 227 (2024)
Yalong Zhang1, Qiuxiang Zhu1,*, Bobo Tian1,**, and Chungang Duan1,2
Author Affiliations
  • 1Key Laboratory of Polar Materials and Devices, Ministry of Education, Shanghai Center of Brain-Inspired Intelligent Materials and Devices, Department of Electronics, East China Normal University, Shanghai 200241, People’s Republic of China
  • 2Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan, 030006 Shanxi, People’s Republic of China
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    DOI: 10.1007/s40820-024-01441-1 Cite this Article
    Yalong Zhang, Qiuxiang Zhu, Bobo Tian, Chungang Duan. New-Generation Ferroelectric AlScN Materials[J]. Nano-Micro Letters, 2024, 16(1): 227 Copy Citation Text show less

    Abstract

    Ferroelectrics have great potential in the field of nonvolatile memory due to programmable polarization states by external electric field in nonvolatile manner. However, complementary metal oxide semiconductor compatibility and uniformity of ferroelectric performance after size scaling have always been two thorny issues hindering practical application of ferroelectric memory devices. The emerging ferroelectricity of wurtzite structure nitride offers opportunities to circumvent the dilemma. This review covers the mechanism of ferroelectricity and domain dynamics in ferroelectric AlScN films. The performance optimization of AlScN films grown by different techniques is summarized and their applications for memories and emerging in-memory computing are illustrated. Finally, the challenges and perspectives regarding the commercial avenue of ferroelectric AlScN are discussed.
    Yalong Zhang, Qiuxiang Zhu, Bobo Tian, Chungang Duan. New-Generation Ferroelectric AlScN Materials[J]. Nano-Micro Letters, 2024, 16(1): 227
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