• Semiconductor Optoelectronics
  • Vol. 43, Issue 3, 510 (2022)
HU Lefeng1,2 and ZHANG Yan1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.16818/j.issn1001-5868.2022012402 Cite this Article
    HU Lefeng, ZHANG Yan. Performance and Mechanism Analysis of Thin Absorption Region AlGaN Schottky Solarblind Detector with Different Metal Contact[J]. Semiconductor Optoelectronics, 2022, 43(3): 510 Copy Citation Text show less

    Abstract

    For a Schottky detector with a thin absorption region of 100~200nm, the influence of different metal contacts on the dark current and spectral response characteristics was studied. Taking GaNbased materials as the main body, Au and Ni/Au were prepared on the surface of thin Al0.42Ga0.58N to form Schottky contacts, and Ti/Al/Ti/Au were prepared on the surface of Al0.55Ga0.45N to form ohmic contacts. Thus, an AlGaN Schottky solarblind detector with a thin absorption region is fabricated. The results show that for AlGaN material, the photoresponse of Au Schottky detector is good, reaching 0.10A/W, the peak external quantum efficiency is 47%, but the dark current is slightly larger, which is 3.91×10-10A/cm2. The dark current of Ni/Au Schottky detector is stable at 4.17×10-11A/cm2, while the responsivity is generally 0.07A/W, and the external quantum efficiency is 33%. The test results are consistent with the simulation model. For the front irradiation mode, Au Schottky detector has a larger response range and higher responsivity than Ni/Au Schottky detector due to factors such as barrier height and interface loss layer. For the back irradiation mode, the thickness of the absorption layer has a great effect on the response range, and the thin absorption region effectively extends the response range.
    HU Lefeng, ZHANG Yan. Performance and Mechanism Analysis of Thin Absorption Region AlGaN Schottky Solarblind Detector with Different Metal Contact[J]. Semiconductor Optoelectronics, 2022, 43(3): 510
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