• Infrared and Laser Engineering
  • Vol. 52, Issue 3, 20220468 (2023)
Yizhe Wang, Xuehao Yu, Molin Liu, Nengwei Zhu*..., Libing You and Xiaodong Fang|Show fewer author(s)
Author Affiliations
  • College of New Materials and New Energies, Shenzhen Technology University, Shenzhen 518118, China
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    DOI: 10.3788/IRLA20220468 Cite this Article
    Yizhe Wang, Xuehao Yu, Molin Liu, Nengwei Zhu, Libing You, Xiaodong Fang. Study on light source of low jitter excimer laser amplifier[J]. Infrared and Laser Engineering, 2023, 52(3): 20220468 Copy Citation Text show less
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    CLP Journals

    [1] Xuehao Yu, Xiaodong Fang, Libing You, Yizhe Wang, Molin Liu, Hao Wang. Research progress of excimer laser annealing in semiconductor integrated circuit manufacturing[J]. Infrared and Laser Engineering, 2023, 52(12): 20230285

    Yizhe Wang, Xuehao Yu, Molin Liu, Nengwei Zhu, Libing You, Xiaodong Fang. Study on light source of low jitter excimer laser amplifier[J]. Infrared and Laser Engineering, 2023, 52(3): 20220468
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